DCM-40/60
Double View Microscope (applicable to wafers up to 4 and 6 inches in diameter)
DCM-40/60 are unique microscope systems superimposing top and bottom patterns of specimen (wafer) in the view field of microscope, then comparing shift to measure the shift length by measuring system. Since the objective lenses installed at top and bottom are 5 types, ranging from 50X to 1000X in total magnification, various specimens can be observed.
| DCM-60 | DCM-40 | ||||||||||||||||
| Objectives (To be selected by customer) |
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| Eyepiece | A pair of SUW10X (including Micrometer Reticle) | A pair of UW10X (including Micrometer Reticle) | |||||||||||||||
| Total Magnification | 50X to 400X (Larger Magnifications are available on custom-order basis.) | ||||||||||||||||
| Travel Distance of Upper Objective | 24mm | 30mm | |||||||||||||||
| Travel Distance of Lower Objective | 3mm | 12mm | |||||||||||||||
| Filter | Top:Green / Bottom:Red | ||||||||||||||||
| Stage & Counter | 150 x 150mm Manual Stage KC-12R Counter (1μm reading) | 50 x 50mm Manual Stage, Digital Micrometer (1μm reading) 100 x 100mm Manual Stage, KC-12R Counter (1μm reading) | |||||||||||||||
| Stage Travel | X : 150mm Y : 150mm | X : 50mm Y : 50mm X : 100mm Y : 100mm | |||||||||||||||
| Wafer Holder | Maximum : 6 inches | Maximum : 4 inches | |||||||||||||||
| Holder can be supplied in specially designed shape on custom-order basis. | |||||||||||||||||
| Stage Rotation | 360° | ||||||||||||||||
| Illumination | 150W Halogen Light Guide Illumination | ||||||||||||||||
| Thickness of Material | 20mm or less | 30mm or less | |||||||||||||||
| Type of Calibration Chart | Calibration Chart for Optical Axis Alignment | ||||||||||||||||
Download PDF leaflet DCM-40/60